Film Deposition&Heat Treatment
Equipped with various film deposition, oxide layer, annealing
PBII is suitable for carbon film for pre-annealing of SiC, RTA is for annealing.
- 企業:株式会社イオンテクノセンター
- 価格:応相談
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Equipped with various film deposition, oxide layer, annealing
PBII is suitable for carbon film for pre-annealing of SiC, RTA is for annealing.